EGV200

Install on Alliance and Lam standalone system easily

Compatible with 853-012875-001 ASSY GATE DRIVE INNER

Compatible with 853-442078-001 ASSY, GATE DRIVE, ALLI 6

Features;

Supple open, close movement by Cam roller

Hard Anodized & Polished Gate

Particle free

Light weight

Pneumatic actuator

Easy install/uninstall from Small size

Easy to maintenance

Specifications

Dimension                                      91x50x246(WxDxH mm)

Pressure range                              ATM to 1×10-9Torr

External leakage at shaft seal     less than 1×10-9 Std cc/sec He

Speed (Open to close)                  0~2 sec Adjustable

Seal Material                                  Viton

Operating temperature                 Max 80°C

Position indicator                          LED

Position sensor                             Non-contact magnetic

Pneumatic connection                 1/8 PT

Cylinder air pressure                     80±20 Psig

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