Matching box for Isotropic etching

660-021964-001 AE match, AZX-10 replacement

Specification

Model name: AMV-1000E-R45 Rev A.
Frequency: 13.56MHz
Maximum through power: 1000W
Input impedance: 50±2Ώ
RF Input connector: N-R Type Female RF Output connector: φ 1/4” RF Bar
Ground terminal: Matcher Case & FG GND Terminal
Matching circuit Inverse: “π” Network
Reflected power: 10W or 1% max of forward power, whichever is generator
Tuning range R: 4~150, X:-120~350 (T.B.D)
Variable elemen:t Variable Air Varicon
Capacitor control motor: 2 phase pulse motor
Matching time: Within 2 sec from preset position with RF input stable
Cooling method: Forced Air(Option)
Safety features: coaxial cable not connected, open cover, power off
AC Power supply: DC24V,3A(Max)
Case material /Surface coating: Aluminum / chrome-free
Weight: 8kg​

Operating condition

Ambient temperature; 10℃~+40℃

Relative Humidity; 20~80%(non-condensing)

Altitude; <2000m above sea level

Characteristic

Vacuum caps and servo motors

Faster matching time

Installation onto Rainbow 4500i, 4520i

Matching range

Ordnance and Setup: change is possible.

R : 4~150 Ω

X : -120~+350 Ω