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7개 결과 출력

2300Flex45

  1. V2 Platform
  2. Wafer size: 300mm
  3. 3 chambers configuration
  4. IGS

2300Metal

  1. V2 Platform
  2. Wafer size: 300mm
  3. 4 chambers configuration
  4. IGS

Exelan PM

  1. Process Module Serial Number : XXXX
  2. Wafer Size : 200mm Wafer ( 8” )
  3. DFC Frequency 2 & 27MHz
  4. OB1-R03
  5. HGP pump

One box OB1-R03

  1. Part Number 660-099877R101
  2. Integrated RF box module
  3. 27M RF Generator
  4. 2M RF Generator
  5. Matcher

Rainbow 4400

  1. System Serial Number : XXXX
  2. S/W : →Classic
  3. Transportation Wafer Size : 200mm Wafer ( 8” )
  4. Indexer : Hine 38A Indexer
  5. RF Generator – Main Chamber : Off-board _ ENI650A
  6. Orbitally welded Gas Box : 6Gases(Main)

TCP 9400

  1. System Serial Number : XXXX
  2. S/W : →Envision
  3. Transportation Wafer Size : 200mm Wafer ( 8” )
  4. Indexer : Hine 38A Indexer
  5. TCP RF Generator RFG Halo
  6. Bottom RF Generator RFG1250
  7. Orbitally welded Gas Box : 8Gases(Main)
  8. Turbo STP2200

TCP 9600

  1. System Serial Number : XXXX
  2. S/W : →Envision
  3. Transportation Wafer Size : 200mm Wafer ( 8” )
  4. Indexer : Hine 38A Indexer
  5. TCP RF Generator RFG Halo
  6. Bottom RF Generator RFG1250
  7. DSQ RF Generator RFG1250
  8. Orbitally welded Gas Box
  9. Turbo STP1300