Equipment
- System Serial Number : XXXX
- S/W : → Envision
- Transportation Wafer Size : 200mm Wafer ( 8” )
- Indexer : Hine 38A Indexer
- TCP RF Generator RFG Halo
- Bottom RF Generator RFG1250
- DSQ RF Generator RFG1250
- Orbitally welded Gas Box
- Turbo STP1300
- Process Module Serial Number : XXXX
- Wafer Size : 200mm Wafer ( 8” )
- DFC Frequency 2 & 27MHz
- OB1-R03
- HGP pump
- Part Number 660-099877R101
- Integrated RF box module
- 27M RF Generator
- 2M RF Generator
- Matcher
- System Serial Number : XXXX
- S/W : →Classic
- Transportation Wafer Size : 200mm Wafer ( 8” )
- Indexer : Hine 38A Indexer
- RF Generator – Main Chamber : Off-board _ ENI650A
- Orbitally welded Gas Box : 6Gases(Main)
- System Serial Number : XXXX
- S/W : → Envision
- Transportation Wafer Size : 200mm Wafer ( 8” )
- Indexer : Hine 38A Indexer
- TCP RF Generator RFG Halo
- Bottom RF Generator RFG1250
- DSQ RF Generator RFG1250
- Orbitally welded Gas Box : 8Gases(Main)
- Turbo STP2200