Matching box for Isotropic etching
660-021964-001 AE match, AZX-10 replacement
Specification
- Model name: AMV-1000E-R45 Rev A.
- Frequency: 13.56MHz
- Maximum through power: 1000W
- Input impedance: 50±2Ώ
- RF Input connector: N-R Type Female RF Output connector: φ 1/4” RF Bar
- Ground terminal: Matcher Case & FG GND Terminal
- Matching circuit Inverse: “π” Network
- Reflected power: 10W or 1% max of forward power, whichever is generator
- Tuning range R: 4~150, X:-120~350 (T.B.D)
- Variable elemen:t Variable Air Varicon
- Capacitor control motor: 2 phase pulse motor
- Matching time: Within 2 sec from preset position with RF input stable
- Cooling method: Forced Air(Option)
- Safety features: coaxial cable not connected, open cover, power off
- AC Power supply: DC24V,3A(Max)
- Case material /Surface coating: Aluminum / chrome-free
- Weight: 8kg
Operating condition
- Ambient temperature; 10℃~+40℃
- Relative Humidity; 20~80%(non-condensing)
- Altitude; <2000m above sea level
Matching range
- Ordnance and Setup: change is possible.
- R : 4~150 Ω
- X : -120~+350 Ω
Characteristic
- Vacuum caps and servo motors
- Faster matching time
- Installation onto Rainbow 4500i, 4520i