EGV200
Install on Alliance and Lam standalone system easily
Compatible with 853-012875-001 ASSY GATE DRIVE INNER
Compatible with 853-442078-001 ASSY, GATE DRIVE, ALLI 6
Features
- Supple open, close movement by Cam roller
- Hard Anodized & Polished Gate
- Particle free
- Light weight
- Pneumatic actuator
- Easy install/uninstall from Small size
- Easy to maintenance
Specifications
- Dimension / 91x50x246(WxDxH mm)
- Pressure range / ATM to 1×10-9Torr
- External leakage at shaft seal / less than 1×10-9 Std cc/sec He
- Speed (Open to close) / 0~2 sec Adjustable
- Seal Material / Viton
- Operating temperature / Max 80°C
- Position indicator / LED
- Position sensor / Non-contact magnetic
- Pneumatic connection / 1/8” PT
- Cylinder air pressure / 80±20 Psig
