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REPAIR

1. REPAIR

RF Repair

  • 2300 / Alliance / TCP Series 대응

Transport Repair

  • RB Series / Robot & Controller

Vacuum Repair

  • Pump / Valve / Gauge

PCB Repair

  • Main Board / I/O Board / PDU

2. FACILITY

Main Jig

  • LAM Jig SYSTEM

Power & RF

  • RF Generator / Power Transformer

Diagnosis

  • Oscilloscope

Vacuum & Leak

  • Leak Detector / Vacuum Pump

3. Repaired Records

Repaired Records
Description Part Number
MAGNETICS POWER SUPPLY PM2675A-1-3
DELTRON POWER SUPPLY PS1 FM12C6-08-CG
MATRIX BOARD 97780-005
ANAFAZE CONTROLLER 88-11320-300
LAM IPC 856-900240-400
EPD 853-540066-011
EPD 853-540066-005
EPD 853-540066-001
EPD 853-540064-001
INNERDOOR 853-442078-001
INNERDOOR 853-442064-003
INNERDOOR 853-442064-002
INNERDOOR 853-442064-001
VCI BOARD 853-370871-002
BOTTOM MATCH 853-330951-021
ESC POWER SUPPLY 853-330473-001
TCP-SENSOR BOX 853-330281-002
INDEXER ASSY 853-029295-102
BOTTOM MATCH 853-250001-024
BOTTOM MATCH 853-250001-023
TCP9600 T-MATCH 853-140389-001
OUT DOOR 853-140013-001
PADDLE LIFTER 853-032776-002
PADDLE LIFTER 853-032776-001
TCP9400 T-MATCH 853-032294-003
TCP9400 T-MATCH 853-032294-002
TCP9400 T-MATCH 853-032294-001
TCP9600 T-MATCH 853-032190-008
INDEXER ASSY 853-029595-101
LOFAT 853-025903-002
DSQ MATCH 853-025735R-001
DSQ MATCH 853-025735-008
DSQ MATCH 853-025735-004
DSQ MATCH 853-025735-001
BOTTOM MATCH 853-025083-022
BOTTOM MATCH 853-025083-003
BOTTOM MATCH 853-025083-001
ESC POWER SUPPLY 853-025054-018
ESC POWER SUPPLY 853-025054-003
ESC POWER SUPPLY 853-025054-002
ESC POWER SUPPLY 853-025054-001
ARM HOUSING ASSY 853-021819-002
ARM HOUSING ASSY 853-021819-001
ARM HOUSING ASSY 853-021819-001
ESC POWER SUPPLY 853-017086-018
ESC POWER SUPPLY 853-017086-002
CPU BOARD 853-017034-110
BOTTOM MATCH 853-015130-102
BOTTOM MATCH 853-015130-002
INNERDOOR 853-012875-001
INDEXER ASSY 853-012600-101
INDEXER ASSY 853-012600-002
LIFTER SPINNER 853-012525-001
EDGE DETECTOR ASSY 853-012500-002
INNERDOOR 853-012261-001
INNERDOOR 853-012200-002
HARMONIC ARM 853-012175-004
HARMONIC ARM 853-012175-003
HARMONIC ARM 853-012175-001
HARMONIC ARM 853-012123-004
HARMONIC ARM 853-012123-002
HARMONIC ARM 853-012123-001
ARM HOUSING ASSY 853-012100-003
MONOCHROMATOR 853-011094-001
EPD 853-001983-005
THROTTLE VALVE 839-013901-001
ENGENUITY BOARD 810-707183-001
48RA CONTROL BOARD 810-005843-001
SRAM BOARD 810-057059-002
MOTOR CONTROLL DRIVER 810-017093-001
ESC POWER SUPPLY 810-017086-018
ESC POWER SUPPLY 810-017086-010
ESC POWER SUPPLY 810-017086-003
ESC POWER SUPPLY 810-017086-002
DSQ DIP BOARD 810-017057-001
ADIO BOARD 810-017052-009
ADIO 8번 BOARD 810-017050-004
SERIAL BOARD 810-017038-002
SERIAL BOARD 810-017038-002
SASI BOARD 810-017035-001
CPU BOARD 810-017034-300
CPU BOARD 810-017034-005
CPU BOARD 810-017034-003
ADIO BOARD 810-017031-004
ADIO BOARD 810-017031-003
ADIO BOARD 810-017031-002
ADIO BOARD 810-017031-001
GAP MOTOR CONTROL BOARD 810-017018-002
AMP INTERLOCK BOARD 810-017013-001
HEARTBEAT BOARD 810-017012-002
CONVECTRON TUBE INTERFACE B/D 810-017007-001
DIP BOARD 810-017003-005
DIP BOARD 810-017003-004
DIP BOARD 810-017003-002
DIP BOARD 810-017003-001
AUTOTUNE BOARD 810-015987-101
AUTOTUNE BOARD 810-015987-003
AUTOTUNE BOARD 810-015987-001
AUTOTUNE BOARD 810-015932-002
AUTOTUNE BOARD 810-015932-001
DIP BOARD 810-007003-004
INDEXER ASSY 799-012600-001
UPC 797-900918-002
PM-7 CONTROLLER 796-098290-002
AC-2 796-006238-001
MAGNETEC POWER SUPPLY 660-098076-002
MAGNETEC POWER SUPPLY 660-098040-001
OMEGA POWER SUPPLY (PS2) 660-091821-003
DELTRON POWER SUPPLY PS2 660-091821-001
RF GENERATOR 660-024637-028
RF GENERATOR 660-024637-026
POWER SUPPLY PS1 660-007612-001
STEPPER MOTOR DRIVER BOARD 605-017016-100
48RA INDEXER ASSY 05309-023
SLIT DOOR ASSY 02010-BA24-1001
ALIGNER CONTROLLER 011-4130-03
OUT DOOR 853-140013-001
INNER DOOR 853-044264-003