1. REPAIR
RF Repair
- 2300 / Alliance / TCP Series 대응
Transport Repair
- RB Series / Robot & Controller
Vacuum Repair
- Pump / Valve / Gauge
PCB Repair
- Main Board / I/O Board / PDU
2. FACILITY
Main Jig
- LAM Jig SYSTEM
Power & RF
- RF Generator / Power Transformer
Diagnosis
- Oscilloscope
Vacuum & Leak
- Leak Detector / Vacuum Pump
3. Repaired Records
| Description | Part Number |
|---|---|
| MAGNETICS POWER SUPPLY | PM2675A-1-3 |
| DELTRON POWER SUPPLY PS1 | FM12C6-08-CG |
| MATRIX BOARD | 97780-005 |
| ANAFAZE CONTROLLER | 88-11320-300 |
| LAM IPC | 856-900240-400 |
| EPD | 853-540066-011 |
| EPD | 853-540066-005 |
| EPD | 853-540066-001 |
| EPD | 853-540064-001 |
| INNERDOOR | 853-442078-001 |
| INNERDOOR | 853-442064-003 |
| INNERDOOR | 853-442064-002 |
| INNERDOOR | 853-442064-001 |
| VCI BOARD | 853-370871-002 |
| BOTTOM MATCH | 853-330951-021 |
| ESC POWER SUPPLY | 853-330473-001 |
| TCP-SENSOR BOX | 853-330281-002 |
| INDEXER ASSY | 853-029295-102 |
| BOTTOM MATCH | 853-250001-024 |
| BOTTOM MATCH | 853-250001-023 |
| TCP9600 T-MATCH | 853-140389-001 |
| OUT DOOR | 853-140013-001 |
| PADDLE LIFTER | 853-032776-002 |
| PADDLE LIFTER | 853-032776-001 |
| TCP9400 T-MATCH | 853-032294-003 |
| TCP9400 T-MATCH | 853-032294-002 |
| TCP9400 T-MATCH | 853-032294-001 |
| TCP9600 T-MATCH | 853-032190-008 |
| INDEXER ASSY | 853-029595-101 |
| LOFAT | 853-025903-002 |
| DSQ MATCH | 853-025735R-001 |
| DSQ MATCH | 853-025735-008 |
| DSQ MATCH | 853-025735-004 |
| DSQ MATCH | 853-025735-001 |
| BOTTOM MATCH | 853-025083-022 |
| BOTTOM MATCH | 853-025083-003 |
| BOTTOM MATCH | 853-025083-001 |
| ESC POWER SUPPLY | 853-025054-018 |
| ESC POWER SUPPLY | 853-025054-003 |
| ESC POWER SUPPLY | 853-025054-002 |
| ESC POWER SUPPLY | 853-025054-001 |
| ARM HOUSING ASSY | 853-021819-002 |
| ARM HOUSING ASSY | 853-021819-001 |
| ARM HOUSING ASSY | 853-021819-001 |
| ESC POWER SUPPLY | 853-017086-018 |
| ESC POWER SUPPLY | 853-017086-002 |
| CPU BOARD | 853-017034-110 |
| BOTTOM MATCH | 853-015130-102 |
| BOTTOM MATCH | 853-015130-002 |
| INNERDOOR | 853-012875-001 |
| INDEXER ASSY | 853-012600-101 |
| INDEXER ASSY | 853-012600-002 |
| LIFTER SPINNER | 853-012525-001 |
| EDGE DETECTOR ASSY | 853-012500-002 |
| INNERDOOR | 853-012261-001 |
| INNERDOOR | 853-012200-002 |
| HARMONIC ARM | 853-012175-004 |
| HARMONIC ARM | 853-012175-003 |
| HARMONIC ARM | 853-012175-001 |
| HARMONIC ARM | 853-012123-004 |
| HARMONIC ARM | 853-012123-002 |
| HARMONIC ARM | 853-012123-001 |
| ARM HOUSING ASSY | 853-012100-003 |
| MONOCHROMATOR | 853-011094-001 |
| EPD | 853-001983-005 |
| THROTTLE VALVE | 839-013901-001 |
| ENGENUITY BOARD | 810-707183-001 |
| 48RA CONTROL BOARD | 810-005843-001 |
| SRAM BOARD | 810-057059-002 |
| MOTOR CONTROLL DRIVER | 810-017093-001 |
| ESC POWER SUPPLY | 810-017086-018 |
| ESC POWER SUPPLY | 810-017086-010 |
| ESC POWER SUPPLY | 810-017086-003 |
| ESC POWER SUPPLY | 810-017086-002 |
| DSQ DIP BOARD | 810-017057-001 |
| ADIO BOARD | 810-017052-009 |
| ADIO 8번 BOARD | 810-017050-004 |
| SERIAL BOARD | 810-017038-002 |
| SERIAL BOARD | 810-017038-002 |
| SASI BOARD | 810-017035-001 |
| CPU BOARD | 810-017034-300 |
| CPU BOARD | 810-017034-005 |
| CPU BOARD | 810-017034-003 |
| ADIO BOARD | 810-017031-004 |
| ADIO BOARD | 810-017031-003 |
| ADIO BOARD | 810-017031-002 |
| ADIO BOARD | 810-017031-001 |
| GAP MOTOR CONTROL BOARD | 810-017018-002 |
| AMP INTERLOCK BOARD | 810-017013-001 |
| HEARTBEAT BOARD | 810-017012-002 |
| CONVECTRON TUBE INTERFACE B/D | 810-017007-001 |
| DIP BOARD | 810-017003-005 |
| DIP BOARD | 810-017003-004 |
| DIP BOARD | 810-017003-002 |
| DIP BOARD | 810-017003-001 |
| AUTOTUNE BOARD | 810-015987-101 |
| AUTOTUNE BOARD | 810-015987-003 |
| AUTOTUNE BOARD | 810-015987-001 |
| AUTOTUNE BOARD | 810-015932-002 |
| AUTOTUNE BOARD | 810-015932-001 |
| DIP BOARD | 810-007003-004 |
| INDEXER ASSY | 799-012600-001 |
| UPC | 797-900918-002 |
| PM-7 CONTROLLER | 796-098290-002 |
| AC-2 | 796-006238-001 |
| MAGNETEC POWER SUPPLY | 660-098076-002 |
| MAGNETEC POWER SUPPLY | 660-098040-001 |
| OMEGA POWER SUPPLY (PS2) | 660-091821-003 |
| DELTRON POWER SUPPLY PS2 | 660-091821-001 |
| RF GENERATOR | 660-024637-028 |
| RF GENERATOR | 660-024637-026 |
| POWER SUPPLY PS1 | 660-007612-001 |
| STEPPER MOTOR DRIVER BOARD | 605-017016-100 |
| 48RA INDEXER ASSY | 05309-023 |
| SLIT DOOR ASSY | 02010-BA24-1001 |
| ALIGNER CONTROLLER | 011-4130-03 |
| OUT DOOR | 853-140013-001 |
| INNER DOOR | 853-044264-003 |